喷涂氧化钛/氧化锆靶材 Spray TiOx/ZrOx Target
产品说明Product description
以等离子体为热源将相应粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度TiOx，ZrOx靶材。
With plasma as the heat source, high purity high density TiOx amd ZrOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
氧化钛靶材TiOx target
项目 Item | 参数 Specifications | 检测手段 Testing method |
纯度 Purity | ≥99.9% | |
密度 Density | ≥4.0 g/cm3 | 阿基米德密度仪 Archimedes densimeter |
杂质含量 Impurities | SiO2: ≤100ppm P2O5: ≤10 ppm SO2: ≤60 ppm Cu: ≤18 ppm Fe: ≤80 ppm 杂质总和 (Total impurity): ≤1000 ppm | 化学分析 Chemical analysis
|
电阻率 Electrical resistivity | ≤50 mΩ∙cm | 四探针电阻率仪 Four probe resistivity meter |
氧化锆靶材ZrOx target
项目 Item | 参数 Specifications | 检测手段 Testing method |
纯度 Purity | ≥99.9% | |
密度 Density | ≥5.4 g/cm3 | 阿基米德密度仪 Archimedes densimeter |
杂质含量 Impurity content
| Al: ≤100 ppm Cr: ≤50 ppm Ti: ≤100 ppm Fe: ≤200 ppm 杂质总和 (Total impurity): ≤1000 ppm | ICP |
电阻率 Electrical resistivity | ≤0.5 Ω∙cm | 四探针电阻率仪 Four probe resistivity meter |
背管材质 Backing tube
-选用304/316L不锈钢（无磁）
靶材尺寸Dimension
-按照图纸要求加工
According to customized drawings.
应用领域Applications
-光学玻璃AR膜系 AR films of optical glasses
-LOW-E镀膜玻璃 LOW-E glasses
-工具镀膜和装饰镀膜 Tool and decorative coatings
