MBE装置MBE-260概要： |
该MBE设备是超高真空装置，可以用从外部引入的激光在真空中激发，并将材料沉积在衬底上。
MBE装置MBE-260规格参数： |
Configure | Spec | |
Processing room and vacuum exhaust system | Chamber Sharp | φ260mm Spherical SUS |
Reaching vacuum | Less than6.7×10-7Pa (5×10-9Torr) | |
Ceramic bearing turbo pump | 250L/s | |
Target revolution unit | φ20mm×6 axes Rotation / revolution motor drive (PC control) | |
Substrate heating unit | Infrared lamp substrate heating unit (can be changed to semiconductor laser substrate heating unit) | |
Size of substrate | 10mm | |
Maximum heating temperature | Above 800℃ | |
Common specification | Power supply / control rack (JIS standard compliant) integrated chamber frame PLD automatic control system (PC and control software) | |
